JPS6420731U - - Google Patents
Info
- Publication number
- JPS6420731U JPS6420731U JP1987114528U JP11452887U JPS6420731U JP S6420731 U JPS6420731 U JP S6420731U JP 1987114528 U JP1987114528 U JP 1987114528U JP 11452887 U JP11452887 U JP 11452887U JP S6420731 U JPS6420731 U JP S6420731U
- Authority
- JP
- Japan
- Prior art keywords
- light
- illumination
- wafer
- section
- epi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114528U JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114528U JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420731U true JPS6420731U (en]) | 1989-02-01 |
| JPH0346501Y2 JPH0346501Y2 (en]) | 1991-10-01 |
Family
ID=31355361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987114528U Expired JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346501Y2 (en]) |
-
1987
- 1987-07-28 JP JP1987114528U patent/JPH0346501Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0346501Y2 (en]) | 1991-10-01 |